Spectroscopic Diagnostics of Pulsed Microwave Plasmas used for Nanocrystalline Diamond Growth

✍ Scribed by Fabien Bénédic; Xavier Duten; Ousmane Syll; Guillaume Lombardi; Khaled Hassouni; Alix Gicquel

• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 252 KB
• Volume: 14
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200706658