𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Diamond films synthesized by microwave plasma CVD

✍ Scribed by Zhang Zhiming; Hong Ailing; Zhuang Zhichen; Zhu Pingfang; Wan Chen

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
124 KB
Volume
42
Category
Article
ISSN
0042-207X

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Structural and mechanical characterizati
Structural and mechanical characterization of diamond like carbon films grown by microwave plasma CVD
✍ Sambita Sahoo; Swati S. Pradhan; Venkateswarlu Bhavanasi; S.K. Pradhan πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 899 KB

Diamond like carbon (DLC) films is useful for tribology, optical and biocompatible coating applications. Plasma-activated processes such as radio frequency (RF) plasma CVD and electron cyclotron resonance (ECR) microwave (MW) plasma CVD are usually used to grow DLC films. By using a bowl shaped stee

Growth of nanocrystalline diamond films
Growth of nanocrystalline diamond films deposited by microwave plasma CVD system at low substrate temperatures
✍ Potocky, S. ;Kromka, A. ;Potmesil, J. ;Remes, Z. ;Polackova, Z. ;Vanecek, M. πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 346 KB

## Abstract Nanocrystalline diamond (NCD) films were grown by microwave plasma CVD in hydrogen‐based gas mixture. Deposition experiments were performed at different temperatures varying from 370 to 1100 Β°C. Before growth step, silicon (100) oriented substrates were nucleated by bias enhanced nuclea