Synthesis of diamond films from organic compounds by Pulsed Liquid Injection CVD

✍ Scribed by J. Morales; L.M. Apátiga; V.M. Castaño

• Book ID: 104094294
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 577 KB
• Volume: 203
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2008.05.030

✦ Synopsis

Diamond films were deposited onto Si substrates by Pulsed Liquid Injection Chemical Vapor Deposition (PLICVD) by the flash evaporation of small micro-doses of acetone, ethanol and methanol into the evaporation zone, at 280 °C. The resulting vapor mixture is transported by a carrier gas into the hightemperature reaction chamber, where the diamonds nucleate and grow onto the substrate at 850 °C. The films, characterized by Raman spectroscopy and Scanning Electron Microscopy, show ball-shaped structures in the 200 to 500 nm range, as well as the characteristic Raman diamond band at 1332 cm -1 . The effect of the experimental parameters is analyzed and discussed in terms of their crystallinity, composition, structure and morphology.