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Synthesis of Diamond Thin Films by DC Plasma Using organic Compounds

✍ Scribed by Wang, Wanlu ;Liao, Kejun ;Gao, Jinying

Book ID
105382944
Publisher
John Wiley and Sons
Year
1991
Tongue
English
Weight
201 KB
Volume
128
Category
Article
ISSN
0031-8965

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Synthesis of diamond films from organic
Synthesis of diamond films from organic compounds by Pulsed Liquid Injection CVD
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Diamond films were deposited onto Si substrates by Pulsed Liquid Injection Chemical Vapor Deposition (PLICVD) by the flash evaporation of small micro-doses of acetone, ethanol and methanol into the evaporation zone, at 280 Β°C. The resulting vapor mixture is transported by a carrier gas into the high