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Synthesis of Diamond Thin Films by Thermal CVD Using Organic Compounds

✍ Scribed by Hirose, Yoichi; Terasawa, Yuki

Book ID
117996775
Publisher
Institute of Pure and Applied Physics
Year
1986
Tongue
English
Weight
538 KB
Volume
25
Category
Article
ISSN
0021-4922

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πŸ“œ SIMILAR VOLUMES

Synthesis of Diamond Thin Films by Therm
Synthesis of Diamond Thin Films by Thermal CVD Using Organic Compounds
✍ Hirose, Yoichi; Terasawa, Yuki πŸ“‚ Article πŸ“… 1986 πŸ› Institute of Pure and Applied Physics 🌐 English βš– 538 KB

Diamond thin films have been formed by thermal chemical vapor deposition (thermal CVD) using the organic compounds such as CH3OH, C2H5OH, CH3COCH3 C2H5OC2H5, and (CH3)3N. The films are grown on the silicon substrates with high growth rate (8–10 Β΅m/h) under the pressure ranging 1–800 Torr. This growt

Synthesis of diamond films from organic
Synthesis of diamond films from organic compounds by Pulsed Liquid Injection CVD
✍ J. Morales; L.M. ApΓ‘tiga; V.M. CastaΓ±o πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 577 KB

Diamond films were deposited onto Si substrates by Pulsed Liquid Injection Chemical Vapor Deposition (PLICVD) by the flash evaporation of small micro-doses of acetone, ethanol and methanol into the evaporation zone, at 280 Β°C. The resulting vapor mixture is transported by a carrier gas into the high