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Synthesis of aluminium nitride thin films by ion-vapour deposition method

✍ Scribed by Yoshikazu Nakamura; Yoshihisa Watanabe; Shigekazu Hirayama; Yuusaku Naota

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 865 KB
Volume: 68-69
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(94)90161-9

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