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Synthesis and physicochemical characterization of silicon oxynitride thin films prepared by rf magnetron sputtering

✍ Scribed by Pinard, L. ;Mackowski, J. M.

Book ID: 115346244
Publisher: The Optical Society
Year: 1997
Tongue: English
Weight: 353 KB
Volume: 36
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.36.005451

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