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Preferred orientations of NiO thin films prepared by RF magnetron sputtering

✍ Scribed by H. W. Ryu; G. P. Choi; W. S. Lee; J. S. Park


Book ID
111590520
Publisher
Springer
Year
2004
Tongue
English
Weight
334 KB
Volume
39
Category
Article
ISSN
0022-2461

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CdS Thin Films Prepared by RF Magnetron
✍ Punnoose, A. ;Marafi, M. ;Prabu, G. ;El-Akkad, F. πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 162 KB πŸ‘ 2 views

CdS thin films were prepared using rf planar magnetron sputtering in Ar atmosphere. Different deposition temperatures between 150 and 250 C and different rf powers between 30 and 130 W were used. The films had hexagonal structure with crystallites oriented in the h100i direction. The increase of dep