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Sustained self sputtering of different materials using dc magnetron

✍ Scribed by WM Posadowski

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
459 KB
Volume
46
Category
Article
ISSN
0042-207X

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πŸ“œ SIMILAR VOLUMES

Optical and electrical properties of nan
Optical and electrical properties of nanocrystal zinc oxide films prepared by dc magnetron sputtering at different sputtering pressures
✍ Atanas TanuΕ‘evski; Verka Georgieva πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 673 KB

The nanocrystal thin films of zinc oxide doped by Al (ZnO:Al) were deposited by dc reactive magnetron sputtering on the glass substrates, in the pressure range of 33-51 Pa. From the X-ray diffraction patterns, the nanocrystalline structure of ZnO:Al films and the grain size were determined. The opti