Effects of different glow discharge conditions on deposition rates of copper in a dc magnetron sputtering system

✍ Scribed by A Rizk; SB Youssef; NS Rizk; SK Habib

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 279 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90270-4