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Susceptor effects on the morphological and impurity properties of 4H-SiC epilayers

✍ Scribed by Barbara E. Landini

Book ID: 107452436
Publisher: Springer US
Year: 2000
Tongue: English
Weight: 297 KB
Volume: 29
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-000-0082-8

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