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The effects of T1 impurities on the properties of amorphous SiC:H films prepared by co-sputtering

✍ Scribed by N. Saito; Y. Inui; T. Yamaguchi; I. Nakaaki


Book ID
113205345
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
255 KB
Volume
281-282
Category
Article
ISSN
0040-6090

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