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Surface studies of SiC epitaxial layers grown by chemical vapor deposition

✍ Scribed by Subba Ramaiah Kodigala; I. Bhat; T.P. Chow; J.K. Kim; E.F. Schubert


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
957 KB
Volume
129
Category
Article
ISSN
0921-5107

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