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Epitaxial growth of α-SiC layers by chemical vapor deposition technique

✍ Scribed by Hiroyuki Matsunami; Shigehiro Nishino; Masanori Odaka; Tetsuro Tanaka

Publisher: Elsevier Science
Year: 1975
Tongue: English
Weight: 441 KB
Volume: 31
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(75)90113-x

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