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Surface roughness, mechanical properties and bonding structure of silicon carbon nitride films grown by dual ion beam sputtering

โœ Scribed by Fei Zhou; Bin Yue; Xiaolei Wang; Xuemei Wu; Lanjian Zhuge


Book ID
116605947
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
928 KB
Volume
492
Category
Article
ISSN
0925-8388

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