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Surface roughness and structural aspects of anodic and cathodic plasma deposited a-Si:H at low temperature

โœ Scribed by George T. Dalakos; Joel L. Plawsky; Peter D. Persans


Book ID
116668234
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
336 KB
Volume
349
Category
Article
ISSN
0022-3093

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