Structural properties and nanoindentation of AlN films by a filtered cathodic vacuum arc at low temperature

✍ Scribed by Ji, X H; Lau, S P; Yu, G Q; Zhong, W H; Tay, B K

• Book ID: 115313670
• Publisher: Institute of Physics
• Year: 2004
• Tongue: English
• Weight: 249 KB
• Volume: 37
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/37/10/009