Surface passivation at low temperature of p- and n-type silicon wafers using a double layer a-Si:H/SiNx:H

✍ Scribed by A. Focsa; A. Slaoui; H. Charifi; J.P. Stoquert; S. Roques

• Book ID: 108215642
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 814 KB
• Volume: 159-160
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2009.02.009