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Optimized surface passivation of n and p type silicon wafers using hydrogenated SiNx layers

โœ Scribed by Vinh Ai Dao; Jongkyu Heo; Youngkuk Kim; Kyunghae Kim; N. Lakshminarayan; Junsin Yi


Book ID
116672480
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
638 KB
Volume
356
Category
Article
ISSN
0022-3093

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