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Stability of a-Si:H deposited at high temperatures and hydrogen dilution in a remote hydrogen plasma reactor

โœ Scribed by N.M. Johnson; P.V. Santos; C.E. Nebel; W.B. Jackson; R.A. Street; K.S. Stevens; J. Walker


Book ID
117146977
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
285 KB
Volume
137-138
Category
Article
ISSN
0022-3093

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