✦ LIBER ✦

Solid-source doping of a-Si:H thin films deposited with a remote hydrogen plasma

✍ Scribed by N.M Johnson; R.A Street; J Walker; K Winer

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Hydrogen plasma transport and deposition

✍ J. S Cross; S Komatsu; J Tanaka; M Mieno; Y Suetsugu; J Sakaguchi; Y Moriyoshi; 📂 Article 📅 1997 🏛 Springer 🌐 English ⚖ 489 KB

Stability of a-Si:H deposited at high te

✍ N.M. Johnson; P.V. Santos; C.E. Nebel; W.B. Jackson; R.A. Street; K.S. Stevens; 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 285 KB

Improvement of plasma-deposited aGe : H

✍ C. Godet; I. El Zawawi; M.L. Théye; M. Gauthier; J.P. Stoquert 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 392 KB

Remote hydrogen plasma chemical vapor de

✍ A. M. Wróbel; A. Walkiewicz-Pietrzykowska; J. E. Klemberg-Sapieha; Y. Hatanaka; 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 463 KB 👁 2 views

The effect of hydrogen on the plasma dep

✍ M. Zeman; M.J. Geerts; J. Siegl; J.W. Metselaar 📂 Article 📅 1991 🏛 Elsevier Science ⚖ 569 KB

Argon ion beam assisted magnetron sputte

✍ Wang, Linqing; Wang, Weiyan; Huang, Junjun; Zeng, Yuheng; Tan, Ruiqin; Song, Wei 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 545 KB