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The effect of hydrogen on the plasma deposition and hydrogen plasma etching of a-SiGe:H thin films

✍ Scribed by M. Zeman; M.J. Geerts; J. Siegl; J.W. Metselaar

Publisher: Elsevier Science
Year: 1991
Weight: 569 KB
Volume: 23
Category: Article
ISSN: 0165-1633
DOI: 10.1016/0165-1633(91)90129-9

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