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Effects of r.f. power on optical and electrical properties of plasma-deposited hydrogenated amorphous silicon thin films

✍ Scribed by J.L. Andújar; J. Kasaneva; J. Serra; A. Canillas; C. Roch; J.L. Morenza; E. Bertran


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
390 KB
Volume
37-38
Category
Article
ISSN
0924-4247

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