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Effects of deposition temperature on properties of r.f. glow discharge amorphous silicon thin films

✍ Scribed by E. Bertran; J.L. Andújar; A. Canillas; C. Roch; J. Serra; G. Sardin


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
664 KB
Volume
205
Category
Article
ISSN
0040-6090

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