The influence of preparation parameters on the deposition rate, density and optical properties of thin hydrogenated amorphous silicon films prepared by r.f. glow discharge

✍ Scribed by G Myburg; R Swanepoel

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 755 KB
• Volume: 149
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(87)90396-8