✦ LIBER ✦

The role of hydrogen during plasma beam deposition of amorphous thin films

✍ Scribed by M.C.M. van de Sanden; R.J. Severens; R.F.G. Meulenbroeks; M.J. de Graaf; Z. Qing; D.K. Otorbaev; R. Engeln; J.W.A.M. Gielen; J.A.M. van der Mullen; D.C. Schram

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 859 KB
Volume: 74-75
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(95)08356-1

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterization of hydrogenated amorpho

Characterization of hydrogenated amorphous carbon thin films by end-Hall ion beam deposition

✍ Y. Tang; Y.S. Li; Q. Yang; A. Hirose 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 481 KB

Direct ion-beam deposition of amorphous

Direct ion-beam deposition of amorphous hydrogenated carbon films

✍ R. Locher; C. Wild; P. Koidl 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 426 KB

Preparation of hydrogenated amorphous si

Preparation of hydrogenated amorphous silicon carbide thin films by plasma enhanced chemical vapour deposition

✍ J Huran; J Šafránková; A.P. Kobzev 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 252 KB

Thin silicon carbide (SiCI films were prepared by plasma enhanced chemical vapour deposition PECVDI. The structural properties of Sic films were investigated by IR, RBS, and ERD measurement techniques. The results showed that the films contain the typical features found in hydrogenated amorphous Sic

The plasma-enhanced deposition of hydrog

The plasma-enhanced deposition of hydrogenated amorphous silicon

✍ B.C. Easton; J.A. Chapman; O.F. Hill; M.J. Powell 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 616 KB

The effect of hydrogen on the plasma dep

The effect of hydrogen on the plasma deposition and hydrogen plasma etching of a-SiGe:H thin films

✍ M. Zeman; M.J. Geerts; J. Siegl; J.W. Metselaar 📂 Article 📅 1991 🏛 Elsevier Science ⚖ 569 KB

Plasma deposition of amorphous hydrogena

Plasma deposition of amorphous hydrogenated carbon films on III-V semiconductors

✍ John J. Pouch; Joseph D. Warner; David C. Liu; Samuel A. Alterovitz 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 363 KB