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Surface morphology of TiSi2 on silicon

✍ Scribed by Hyeongtag Jeon; R.J. Nemanich

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 473 KB
Volume: 184
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(90)90432-d

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