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The influence of silicon substrate crystallinity and doping on TiSi2 thin film morphology

✍ Scribed by T.E. Karlin; S. Nygren; L. Mattsson; E. André; M. Bjuggren; F.M. d'Heurle


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
570 KB
Volume
73
Category
Article
ISSN
0169-4332

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