Influence of TiAs precipitate formation on morphology degradation of the TiSi2/As-doped polysilicon system

✍ Scribed by Hyung-Ho Park; Jeong Yong Lee; Kyoung-Ik Cho; Mun-Cheol Paek; Oh-Joon Kwon; Chi-Kyu Choi; Kee-Soo Nam

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 448 KB
• Volume: 208
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(92)90637-q