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Surface micromachining by sacrificial aluminium etching

✍ Scribed by Westberg, David; Paul, Oliver; Andersson, Gert I; Baltes, Henry

Book ID: 121445336
Publisher: Institute of Physics
Year: 1996
Tongue: English
Weight: 778 KB
Volume: 6
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/6/4/004

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