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Sacrificial etching of AlxGa1-xAs for III–V MEMS surface micromachining

✍ Scribed by P. Kumar; S. Kanakaraju; D.L. DeVoe

Book ID: 106020585
Publisher: Springer
Year: 2007
Tongue: English
Weight: 246 KB
Volume: 88
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-007-4032-7

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