SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Materials and Device Characterization in Micromachining III - Auto-adhesion model for MEMS surfaces taking into account the effect of surface roughness

✍ Scribed by van Spengen, W. Merlijn; De Wolf, Ingrid; Puers, Bob; Vladimirsky, Yuli; Coane, Philip J.

• Book ID: 120819327
• Publisher: SPIE
• Year: 2000
• Weight: 166 KB
• Volume: 4175
• Category: Article
• DOI: 10.1117/12.395617