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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Materials and Device Characterization in Micromachining III - Development of a high-performance SOI-fabricated gyroscope

✍ Scribed by Rajendran, S.; Liew, Kim M.; Loke, Yee C.; Liu, Ai Q.; Vladimirsky, Yuli; Coane, Philip J.

No coin nor oath required. For personal study only.

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