SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Design and fabrication of a micromechanical inverter

✍ Scribed by Chae, Kyoung-Soo; Han, Seungoh; Song, Minseok; Moon, Sung W.; Pak, James Jungho; Karam, Jean Michel; Yasaitis, John A.

• Book ID: 121476239
• Publisher: SPIE
• Year: 2000
• Weight: 584 KB
• Volume: 4174
• Category: Article
• DOI: 10.1117/12.396471