Microstructures using RF sputtered PSG film as a sacrificial layer in surface micromachining

✍ Scribed by Vivekanand Bhatt; Sudhir Chandra; Chatar Singh

• Book ID: 107590174
• Publisher: Indian Academy of Sciences
• Year: 2009
• Tongue: English
• Weight: 580 KB
• Volume: 34
• Category: Article
• ISSN: 0256-2499
• DOI: 10.1007/s12046-009-0033-x