✦ LIBER ✦

Surface etching of 6H-SiC (0001) and surface morphology of the subsequently grown GaN via MOCVD

✍ Scribed by Z. Y. Xie; C. H. Wei; S. F. Chen; S. Y. Jiang; J. H. Edgar

Book ID: 107452505
Publisher: Springer US
Year: 2000
Tongue: English
Weight: 477 KB
Volume: 29
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-000-0153-x

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Surface and defect microstructure of GaN

Surface and defect microstructure of GaN and AlN layers grown on hydrogen-etched 6H–SiC(0001) substrates

✍ Z.J. Reitmeier; S. Einfeldt; R.F. Davis; Xinyu Zhang; Xialong Fang; S. Mahajan 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 875 KB

Hydrogen-etching of 6H-SiC(0001) substrates removed mechanical polishing damage and produced an array of parallel, unit cell high steps. The initial stage of AlN deposition on these etched substrates occurred via island nucleation, both on step edges and on terraces. Coalesced AlN films did not show

The (0001)-surface of 6HSiC: morphology

The (0001)-surface of 6HSiC: morphology, composition and structure

✍ U. Starke; Ch. Bram; P.-R. Steiner; W. Hartner; L. Hammer; K. Heinz; K. Müller 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 978 KB

Morphology of GaN Surfaces and GaN/(Al,G

Morphology of GaN Surfaces and GaN/(Al,Ga)N Interfaces Grown on 6H-SiC(0001) by Reactive Molecular Beam Epitaxy

✍ Thamm, A. ;Brandt, O. ;Trampert, A. ;Ploog, K.H. 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 310 KB 👁 2 views

Effect of hydrogen etching and subsequen

Effect of hydrogen etching and subsequent sacrificial thermal oxidation on morphology and composition of 4H-SiC surfaces

✍ J. T. Wolan; B. A. Grayson; J. Kohlscheen; Y. Emirov; R. Schlaf; W. Swartz; S. E 📂 Article 📅 2002 🏛 Springer US 🌐 English ⚖ 234 KB

Study of the interaction of 4H–SiC and 6

Study of the interaction of 4H–SiC and 6H–SiC(0001)[sub Si] surfaces with atomic nitrogen

✍ M. Losurdo; M. M. Giangregorio; G. Bruno; A. Brown; T. Kim 📂 Article 📅 2004 🏛 American Institute of Physics 🌐 English ⚖ 523 KB

Morphology and atomic structure of the S

Morphology and atomic structure of the SiC(0001̄)3 × 3 surface reconstruction

✍ H.E. Hoster; M.A. Kulakov; B. Bullemer 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 903 KB