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Study of the interaction of 4H–SiC and 6H–SiC(0001)[sub Si] surfaces with atomic nitrogen

✍ Scribed by M. Losurdo; M. M. Giangregorio; G. Bruno; A. Brown; T. Kim

Book ID: 121794530
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 523 KB
Volume: 85
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1814438

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