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Nucleation and growth kinetics of AlN films on atomically smooth 6H–SiC (0001) surfaces

✍ Scribed by Yamada, Satoshi; Kato, Jun-ichi; Tanaka, Satoru; Suemune, Ikuo; Avramescu, Adrian; Aoyagi, Yoshinobu; Teraguchi, Nobuaki; Suzuki, Akira

Book ID
120355436
Publisher
American Institute of Physics
Year
2001
Tongue
English
Weight
570 KB
Volume
78
Category
Article
ISSN
0003-6951

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