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Sequential growths of AlN and GaN layers on as-polished 6H–SiC(0001) substrates

✍ Scribed by Z.J. Reitmeier; S. Einfeldt; R.F. Davis; Xinyu Zhang; Xialong Fang; S. Mahajan

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 813 KB
Volume: 57
Category: Article
ISSN: 1359-6454
DOI: 10.1016/j.actamat.2009.04.026

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