Properties of AlN epitaxial layers on 6H–SiC substrate grown by sublimation in argon, nitrogen, and their mixtures

✍ Scribed by M. Beshkova; Z. Zakhariev; M.V. Abrashev; J. Birch; A. Postovit; R. Yakimova

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 271 KB
• Volume: 129
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2006.01.016