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Study of ZrO2 Film Evolution by Secondary Ion Mass Spectrometry

✍ Scribed by S. Daolio; J. Kristóf; C. Piccirillo; S. Gelosi; B. Facchin; C. Pagura


Publisher
John Wiley and Sons
Year
1996
Tongue
English
Weight
461 KB
Volume
10
Category
Article
ISSN
0951-4198

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✦ Synopsis


The formation of thermally prepared ZrO, thin films on nickel and titanium supports from a hydrated ZrOCI, precursor was followed as a function of the calcination temperature by secondary ion mass spectrometry.

Concentration depth profiles of selected species (e.g. 0 -, CI-, ZrO;, C,H;) were used to foilow the process of film evolution. Although no reaction between the coating and support takes place, the zirconia films show ditrerences in the distribution of main and trace components in the films as well as in the nature of the coatingsupport interface. The results are in agreement with those of former thennoanalytical and evolved gas analysis studies.


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