Polycrystalline zinc oxide thin films with thicknesses in the range 0.3 ~m-1 #m were deposited on silicon and alumina substrates by a spray chemical vapour deposition method. The film was characterized for crystallinity, resistivity and carrier concentration. A modified heterostructure Pd/ZnO(0.38 ~
✦ LIBER ✦
Study of thin oxide films for hydrogen barriers
✍ Scribed by O Van der Biest; F Franck; D Stöver; H.P Buchkremer; W Malléner; H Jonas
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 825 KB
- Volume
- 141
- Category
- Article
- ISSN
- 0040-6090
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