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Hydrogen in oxidized silicon oxynitride thin films

✍ Scribed by J.B.Oude Elferink; F.H.P.M. Habraken; W.F. van der Weg; A.E.T. Kuiper

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 313 KB
Volume: 33-34
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(88)90378-9

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