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Preparation of thin oxide and insulating oxide thin films for multilayered gas sensor

✍ Scribed by Feng Chang Dong; Yasuhiro Shimizu; Makoto Egashira

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 124 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)91254-l

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