๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Deposition and characterization of zinc oxide thin films for hydrogen sensor devices

โœ Scribed by A. Dutta; T.K. Chaudhuri; S. Basu

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
376 KB
Volume
14
Category
Article
ISSN
0921-5107

No coin nor oath required. For personal study only.

โœฆ Synopsis

Polycrystalline zinc oxide thin films with thicknesses in the range 0.3 ~m-1 #m were deposited on silicon and alumina substrates by a spray chemical vapour deposition method. The film was characterized for crystallinity, resistivity and carrier concentration. A modified heterostructure Pd/ZnO(0.38 ~m)/p-Si device was fabricated. The current-voltage characteristics of the device were studied both in the absence and in the presence of hydrogen gas.

๐Ÿ“œ SIMILAR VOLUMES

Modified heterojunction based on zinc ox
Modified heterojunction based on zinc oxide thin film for hydrogen gas-sensor application
โœ S. Basu; A. Dutta ๐Ÿ“‚ Article ๐Ÿ“… 1994 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 473 KB

Device-quahty ZnO thm film IS deposlted by usmg an mdlgenously developed moddied CVD method and a Pd/ZnO/p-B heteropmctlon IS fabricated A study of the current-voltage characterlstlcs of the heterolunctlon m pure air and m air with different concentrations (2000-20 000 ppm) of hydrogen reveals that

Characterization of zinc oxide thin film
Characterization of zinc oxide thin films prepared by pulsed laser deposition at room temperature
โœ Norihiro Sakai; Yoshihiro Umeda; Fumiaki Mitsugi; Tomoaki Ikegami ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 581 KB

Undoped ZnO, Al-doped ZnO (AZO) and Ga-doped ZnO (GZO) thin films were deposited on silica glass substrate at room temperature in a vacuum by KrF excimer laser (ฮป = 248 nm) pulsed laser deposition method. The transparency of ZnO thin films showed the dependence on deposition area. The relationship b