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Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensors applications

✍ Scribed by J.L. Deschanvres; P. Rey; G. Delabouglise; M. Labeau; J.C. Joubert; J.C. Peuzin

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
225 KB
Volume
33
Category
Article
ISSN
0924-4247

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