✦ LIBER ✦

Study of the formation of a carbon layer on a sputtering target during magnetron-enhanced reactive sputtering

✍ Scribed by Pierre Vanden Brande; Stephane Lucas; René Winand; Lucien Renard; Alain Weymeersch

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Formation of the altered layer in silico

✍ A. Galdikas; A. Grigonis; L. Pranevičius; J. Vosylius 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 373 KB

Observations on the operation of a plana

✍ Tatsuo Fukami; Fumihiko Shintani; Masahiko Naoe 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 567 KB

Influence of the target/shield distance

✍ N Filipe; A Cavaleiro; MT Vieira 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 232 KB

Optical band gap of zinc nitride films p

✍ Fujian Zong; Honglei Ma; Wei Du; Jin Ma; Xijian Zhang; Hongdi Xiao; Feng Ji; Che 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 195 KB

7179. A comparison of SiO2 planarization

📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 151 KB

Influence of the Plasma Kinetics on the

✍ Sv. Statev; I. Ivanov; I. Petrov; J. Carlsson; V. Orlinov 📂 Article 📅 1994 🏛 John Wiley and Sons 🌐 English ⚖ 730 KB