✦ LIBER ✦

Study of reactive ion etching of Si and SiO2for CFxCl4−xgases

✍ Scribed by Guadalupe Fortuño

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Reactive and chemically assisted ion bea

✍ MA Carter; GF Goldspink 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 529 KB

Reactive ion beam etching of Si/SiO2 sys

✍ D. Korzec; T. Kessler; J. Engemann 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 998 KB

Reactive ion etching and plasma etching

✍ P. Verdonck; G. Brasseur; J. Swart 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 313 KB

Reactive and chemically assisted ion bea

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 127 KB

Reactive and chemically assisted ion bea

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 155 KB

Reactive ion etching of selected polymer

✍ B. Hand; T. Long; B. C. Dems; F. Rodriguez 📂 Article 📅 1993 🏛 John Wiley and Sons 🌐 English ⚖ 488 KB 👁 1 views