Reactive and chemically assisted ion beam etching of Si and SiO2: M A Carter and G F Goldspink, Vacuum, 38, 1988, 5–10

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 155 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90952-4