✦ LIBER ✦

Reactive and chemically assisted ion beam etching of Si and SiO2: M. A. Carter and G. F. Goldspink. Vacuum38, 5 (1988)

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Reactive and chemically assisted ion bea

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 155 KB

Reactive and chemically assisted ion bea

✍ MA Carter; GF Goldspink 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 529 KB

Reactive ion etching of keep trenches in

📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 125 KB

Temperature dependence of reactive ion b

📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 113 KB